High quality stamp manufacturing
To produce high-quality imprints a high-quality stamp is necessary. SCIL offers easy-to-use equipment to make stamps with the best results. The main advantages of SCIL composite stamps are:
- > 500 imprints
- No deformations
- No print-to-print deviations
- Feature sizes < 10 nm but also up to 50-100 μm
Currently two semi-automatic stamp making tools are available, the SMT200 and SMT300, both capable of producing stamps from notched as well as flat wafers. SMT300 is a further development of the stamp making tools, making it more advanced with logging and monitoring options as well as further developed automation.
Tool | SMT200 | SMT300 |
Operation | Semi-automatic | Semi-automatic |
Master wafer sizes | 3″, 100mm, 150mm, 200mm | 150-200 mm & 300mm |
For use with | AutoSCIL & LabSCIL | FabSCIL, LabSCIL & AutoSCIL |
SMT200
SMT300
SCIL Nanoimprint Solutions supplies all consumables needed to produce stamps but also offers the possibility to produce stamps for customers.